Author: Cadarso V J Pfeiffer K Ostrzinski U Bureau J B Racine G A Voigt A Gruetzner G Brugger J
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.1, 2011-01, pp. : 17003-17008
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