Direct writing laser of high aspect ratio epoxy microstructures

Author: Cadarso V J   Pfeiffer K   Ostrzinski U   Bureau J B   Racine G A   Voigt A   Gruetzner G   Brugger J  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.1, 2011-01, pp. : 17003-17008

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