Fabrication of Ni stamp with high aspect ratio, two-leveled, cylindrical microstructures using dry etching and electroplating

Author： Hansen Ole   Boisen Anja   Hansen Ole   Hansen Ole  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|5|55021-55031

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.5, 2015-05, pp. : 55021-55031

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