Photolithographic fabrication of arbitrarily shaped SU-8 microparticles without sacrificial release layers

Author: Bogunovic L   Anselmetti D   Regtmeier J  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.2, 2011-02, pp. : 27003-27007

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