Characterization of a micromachined vertically deformable varying-pitch grating for a spectrometer

Author: Kim B   Phamduy P   Sinibaldi J   Karunasiri G  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.22, Iss.1, 2012-01, pp. : 15001-15011

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Abstract