Mechanical and structural properties of RF magnetron sputter-deposited silicon carbide films for MEMS applications

Author：   Chandra Sudhir   Kumar Sushil   Bose G  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.22, Iss.2, 2012-02, pp. : 25010-25016

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