Effects of sputtering power on mechanical properties of Cr films deposited by magnetron sputtering

Author： Kim K.   Park M.   Lee W.   Kim H. W.   Lee J. G.   Lee C.  

Publisher： Maney Publishing

ISSN： 1743-2847

Source： Materials Science and Technology, Vol.24, Iss.7, 2008-07, pp. : 838-842

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