Miniature ion-sorption vacuum pump with CNT field-emission electron source

Author: Grzebyk T   Górecka-Drzazga A  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.1, 2013-01, pp. : 15007-15011

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Abstract