Second-order sliding mode control of a 2D torsional MEMS micromirror with sidewall electrodes

Author： Chen H   Sun W J   Sun Z D   Yeow J T W  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.1, 2013-01, pp. : 15006-15014

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