Wafer-level integration of NiTi shape memory alloy on silicon using Au–Si eutectic bonding

Author: Gradin Henrik   Bushra Sobia   Braun Stefan   Stemme Göran    

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.1, 2013-01, pp. : 15008-15021

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