Numerical study of bimetallic actuated micro-membrane with large deformations

Author： Lefevre R   Salette A   Agraffeil C   Guillen J   Déhan C   Morfouli P   Montès L  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.1, 2013-01, pp. : 15011-15019

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