Robust micromachining of compliant mechanisms using silicides

Author: Khosraviani Kourosh   Leung Albert M  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.1, 2013-01, pp. : 15015-15021

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content