Large initial compressive stress in top-down fabricated silicon nanowires evidenced by static buckling

Author: Roux X Le   Parrain F   Bosseboeuf A   Allain P E  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.1, 2013-01, pp. : 15014-15021

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