Integration of BST varactors with surface acoustic wave device by film transfer technology for tunable RF filters

Author： Hirano Hideki Kimura Tetsuya Koutsaroff Ivoyl P Kadota Michio Hashimoto Ken-ya Esashi Masayoshi Tanaka Shuji

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.2, 2013-02, pp. : 25005-25013

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