Micromachined silicon acoustic delay lines for ultrasound applications

Author： Chang Cheng-Chung   Cho Young   Wang Lihong   Zou Jun  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.2, 2013-02, pp. : 25006-25013

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