The significance of the piezoelectric coefficient d31,eff determined from cantilever structures

Author: Dekkers M   Boschker H   van Zalk M   Nguyen M   Nazeer H   Houwman E   Rijnders G  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.2, 2013-02, pp. : 25008-25014

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Abstract