Field-effect piezoresistors for vibration detection of nanobeams by using monolithically integrated MOS capacitors

Author: Cheng Haitao   Yang Heng   Li XinXin   Wang Yuelin  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.2, 2013-02, pp. : 25011-25018

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