Author: Cao H S Holland H J Vermeer C H Vanapalli S Lerou P P P M Blom M Brake H J M ter
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.2, 2013-02, pp. : 25014-25019
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Abstract
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