Micromachined cryogenic cooler for cooling electronic devices down to 30 K

Author: Cao H S   Holland H J   Vermeer C H   Vanapalli S   Lerou P P P M   Blom M   Brake H J M ter  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.2, 2013-02, pp. : 25014-25019

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Abstract