Development of a 3D capacitive gyroscope with reduced parasitic capacitance

Author: Walther A   Desloges B   Lejuste C   Coster B   Audebert P   Willemin J  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.2, 2013-02, pp. : 25013-25020

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Abstract