Ordered arrays of patterned nanoporous silicon

Author: Wang D   Schönherr S   Ji R   Herz A   Ronning C   Schaaf P  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.7, 2013-07, pp. : 74004-74009

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Abstract