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Selected papers from the 23rd MicroMechanics and Microsystems Europe Workshop (MME 2012) (Ilmenau, Germany, September 9–12, 2012)

By Hoffmann Martin in (2013)

IOP Publishing

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Online monitoring of the passivation breakthrough during deep reactive ion etching of silicon using optical plasma emission spectroscopy

By Leopold S,Mueller L,Kremin C,Hoffmann M in (2013)

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A temperature control method for shortening thermal cycling time to achieve rapid polymerase chain reaction (PCR) in a disposable polymer microfluidic device

By Bu Minqiang,Perch-Nielsen Ivan R,Sørensen Karen S,Skov Julia,Sun Yi, ,Pedersen Michael E,Hansen Mikkel F,Wolff Anders in (2013)

IOP Publishing

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Design and characterization of AlN-based in-plane microplate resonators

By Ruiz-Díez V,Manzaneque T,Hernando-García J,Ababneh A,Kucera M,Schmid U,Seidel H,Sánchez-Rojas J L in (2013)

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Ordered arrays of patterned nanoporous silicon

By Wang D,Schönherr S,Ji R,Herz A,Ronning C,Schaaf P in (2013)

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Large area and broadband semi-reflective Bragg mirror membrane manufactured by PECVD

By Bertin H,Bosseboeuf A,Coste P,Péalat M,Roux N in (2013)

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Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry

By Wirtssohn Matti,Sainiemi Lauri,Haapala Markus,Franssila Sami in (2013)

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Electrochemically deposited and etched membranes with precisely sized micropores for biological fluids microfiltration

By Hamzah A A,Abidin H E Zainal,Majlis B Yeop,Nor M Mohd,Ismardi A,Sugandi G,Tiong T Y,Dee C F,Yunas J in (2013)

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Tunable diffractive filters for robust NIR and IR spectroscopy

By Lacolle M,Johansen I R,Bakke T,Sagberg H in (2013)

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Ultra-thin layer packaging for implantable electronic devices

By Hogg A.,Aellen T.,Uhl S.,Graf B.,Keppner H.,Tardy Y.,Burger J. in (2013)

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