Author: Wirtssohn Matti Sainiemi Lauri Haapala Markus Franssila Sami
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.7, 2013-07, pp. : 74006-74011
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Materials Science and Technology, Vol. 10, Iss. 5, 1994-05 ,pp. :