Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry

Author: Wirtssohn Matti   Sainiemi Lauri   Haapala Markus   Franssila Sami  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.7, 2013-07, pp. : 74006-74011

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