Acetylene–argon plasmas measured at a biased substrate electrode for diamond-like carbon deposition: I. Mass spectrometry

Author： Baby A   Mahony C M O   Maguire P D  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.20, Iss.1, 2011-02, pp. : 15003-15018

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