Deposition and characteristics of GaN films on Ni metal substrate by ECR-PEMOCVD

Author: Qin Fuwen   Zhong Miaomiao   Wang Chong   Liu Yuemei   Bian Jiming   Wang Enping   Wang Hui   Zhang Dong  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.24, Iss.12, 2013-12, pp. : 5069-5074

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Abstract