SiOxNy Films deposited with SiCl4 by remote plasma enhanced CVD

Author: Sanchez O.   Martinez-Duart J.M.   Gomez-Sanroman R.J.   Perez-Casero R.   Aguilar M.A.   Falcony C.   Fernandez-Gutierrez F.   Hernández-Vélez M.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.34, Iss.12, 1999-06, pp. : 3007-3012

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