Surface failure mode evaluation of pure AlN and AlN with Al2O3(0.1 μm) oxide layer by microscratch testing

Author： Chouanine Lotfi   Takano Masayuki   Ashihara Fumio   Kamiya Osamu  

Publisher： Springer Publishing Company

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.40, Iss.21, 2005-11, pp. : 5703-5710

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