Polymer-Like C:H Thin Film Coating of Nanopowders in Capacitively Coupled RF Discharge

Author： Kouprine A.   Gitzhofer F.   Boulos M.   Fridman A.  

Publisher： Springer Publishing Company

ISSN： 0272-4324

Source： Plasma Chemistry and Plasma Processing, Vol.24, Iss.2, 2004-06, pp. : 189-215

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