A double microbeam MEMS ohmic switch for RF-applications with low actuation voltage

Author: Samaali Hatem   Najar Fehmi   Choura Slim   Nayfeh Ali   Masmoudi Mohamed  

Publisher: Springer Publishing Company

ISSN: 0924-090X

Source: Nonlinear Dynamics, Vol.63, Iss.4, 2011-03, pp. : 719-734

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Abstract