Hardness of compositionally nano-modulated TiN films

Author: Kusano E.   Kitagawa M.   Satoh A.   Kobayashi T.   Nanto H.   Kinbara A.  

Publisher: Elsevier

ISSN: 0965-9773

Source: Nanostructured Materials, Vol.12, Iss.5, 1999-01, pp. : 807-810

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