Production of nanocrystal layers in monocrystal silicon in the beam-type plasma of a high-voltage discharge

Author: Demkin V.   Melnichuk S.   Semukhin B.  

Publisher: Springer Publishing Company

ISSN: 1064-8887

Source: Russian Physics Journal, Vol.53, Iss.11, 2011-04, pp. : 1140-1144

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