Optical investigation of structures formed by 2 MeV oxygen implantation into silicon

Author: Hatzopoulos N.   Hemment P.L.F.   Siapkas D.I.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.289, Iss.1, 1996-11, pp. : 90-94

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