Role of Ultra Thin SiOx Layer on Epitaxial YSZ/SiOx/Si Thin Film as Multi Functional Buffer Layer by Nano-Probe and In-Situ TEM Investigation

Author： Kiguchi Takanori Wakiya Naoki Shinozaki Kazuo Mizutani Nobuyasu

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.45, Iss.1, 2002-01, pp. : 89-96

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