Key Technologies for High Density FeRAM Applications

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Integrated Ferroelectrics, Vol. 48, Iss. 1, 2002-01 ,pp. : 127-137

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A Low Temperature LNO/PZT/LNO Ferroelectric Capacitor-Over-Interconnect (COI) FeRAM Module for Modular SOC

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Integrated Ferroelectrics, Vol. 48, Iss. 1, 2002-01 ,pp. : 149-160

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A NEW HIGH-RELIABLE 2T/1C FeRAM CELL

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Integration of FeRAM Devices into a Standard CMOS Process-Impact of Ferroelectric Anneals on CMOS Characteristics

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Integrated Ferroelectrics, Vol. 47, Iss. 1, 2002-01 ,pp. : 61-70

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Thickness Scaling of Pb(Zr,Ti)O3 Thin Films and Pt Electrodes for High Density FeRAM Devices

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