Thickness Scaling of Pb(Zr,Ti)O3 Thin Films and Pt Electrodes for High Density FeRAM Devices

Author： Kim Seung-Hyun   Koo C. Y.   Ha S- M.   Woo H- J.   Park D- Y.   Lim J. E.   Hwang C. S.   Ha J.  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.48, Iss.1, 2002-01, pp. : 139-147

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