A Low Temperature LNO/PZT/LNO Ferroelectric Capacitor-Over-Interconnect (COI) FeRAM Module for Modular SOC

Author： Lung S. L.   Chen S. S.   Tsai C. W.   Sheng T. T.   Lai S. C.   Liu C. L.   Wu T. B.   Liu Rich  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.48, Iss.1, 2002-01, pp. : 149-160

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

High Quality Ferroelectric Capacitor for FeRAM Applications

By Ren Tian-Ling   Zhang Lin-Tao   Wang Xiao-Ning   Wei Chao-Gang   Liu Jian-She   Liu Li-Tian   Li Zhi-Jian  

Integrated Ferroelectrics, Vol. 46, Iss. 1, 2002-01 ,pp. : 47-53

Taylor & Francis Ltd

Access to resources Recommend Favorite

SESSION E: FeRAM MATERIALS (PZT, SBT, BLT, BiFeO3, etc.)

By  

Integrated Ferroelectrics, Vol. 94, Iss. 1, 2007-10 ,pp. : 21-21

Taylor & Francis Ltd

Access to resources Recommend Favorite

INTERFACIAL EFFECTS ON THE CRYSTALLIZATION TEMPERATURE OF PMN-PT FILMS DEPOSITED ON LNO OR Pt BOTTOM ELECTRODES

By Detalle M.   Nguyen T. T.   Wang G. S.   Remiens D.  

Integrated Ferroelectrics, Vol. 98, Iss. 1, 2008-01 ,pp. : 171-182

Taylor & Francis Ltd

Access to resources Recommend Favorite

Integration of FeRAM Devices into a Standard CMOS Process-Impact of Ferroelectric Anneals on CMOS Characteristics

By Röhner M.   Mikolajick T.   Nagel N.   Hagenbeck R.  

Integrated Ferroelectrics, Vol. 47, Iss. 1, 2002-01 ,pp. : 61-70

Taylor & Francis Ltd

Access to resources Recommend Favorite

Key Technologies for High Density FeRAM Applications

By Nagel N.   Kunishima I.  

Integrated Ferroelectrics, Vol. 48, Iss. 1, 2002-01 ,pp. : 127-137

Taylor & Francis Ltd

Access to resources Recommend Favorite