A NOVEL MINIATURE OPTICAL SWITCH WITH DOUBLE VERTICAL MICROMIRRORS DRIVEN BY PIEZOELECTRIC CANTILEVER

By FANG HUAJUN   LIU LITIAN   ZHANG NINGXIN   WU XIAOMING   REN TIANLING  

Integrated Ferroelectrics, Vol. 76, Iss. 1, 2005-11 ,pp. : 13-22

Taylor & Francis Ltd

Access to resources Recommend Favorite

A laterally-driven micromachined inertial switch with a compliant cantilever beam as the stationary electrode for prolonging contact time

By Chen Wenguo   Wang Yan   Wang Yongliang   Zhu Bin   Ding Guifu   Wang Hong   Zhao Xiaolin   Yang Zhuoqing  

Journal of Micromechanics and Microengineering, Vol. 24, Iss. 6, 2014-06 ,pp. : 65020-65029

IOP Publishing

Access to resources Recommend Favorite

Cantilever-type electrode array-based high-throughput microparticle sorting platform driven by gravitation and negative dielectrophoretic force

By Kim Youngho   Lee Junghun   Kim Younggeun   Shin Sang-Mo   Kim Byungkyu  

Journal of Micromechanics and Microengineering, Vol. 21, Iss. 1, 2011-01 ,pp. : 15015-15025

IOP Publishing

Access to resources Recommend Favorite

PIEZOELECTRIC 2D-OPTICAL MICRO SCANNERS WITH PZT THICK FILMS

By YASUDA Y.   AKAMATSU M.   TANI M.   IIJIMA T.   TOSHIYOSHI H.  

Integrated Ferroelectrics, Vol. 80, Iss. 1, 2006-11 ,pp. : 341-353

Taylor & Francis Ltd

Access to resources Recommend Favorite

PIEZOELECTRIC 2D-OPTICAL MICRO SCANNERS WITH PZT THICK FILMS

By YASUDA Y.   AKAMATSU M.   TANI M.   IIJIMA T.   TOSHIYOSHI H.  

Integrated Ferroelectrics, Vol. 76, Iss. 1, 2005-11 ,pp. : 81-91

Taylor & Francis Ltd

Access to resources Recommend Favorite