Fabrication and Resonant Behavior of PZT Thick Film Cantilever for BioChip

Author： Kim Hyung Joon Kim Yong-Bum Kang Ji-Yoon Kim Tae Song

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.50, Iss.1, 2002-01, pp. : 11-20

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