Fabrication of (100) Orientated PZT Thin Films for MEMS Applications

By Zhao Hong-Jin   Ren Tian-Ling   Liu Jian-She   Liu Li-Tian   Li Zhi-Jian  

Integrated Ferroelectrics, Vol. 46, Iss. 1, 2002-01 ,pp. : 79-86

Taylor & Francis Ltd

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Fabrication and characterization of laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT structure

By Yoshida Shinya   Wang Nan   Kumano Masafumi   Kawai Yusuke   Tanaka Shuji   Esashi Masayoshi  

Journal of Micromechanics and Microengineering, Vol. 23, Iss. 6, 2013-06 ,pp. : 65014-65024

IOP Publishing

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Piezoelectric Coefficients of PZT Thin Films

By Tsang R. C. W.   Kwok K. W.   Chan H. L. W.   Choy C. L.  

Integrated Ferroelectrics, Vol. 50, Iss. 1, 2002-01 ,pp. : 143-148

Taylor & Francis Ltd

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STUDIES OF SOME DOPANTS: EFFECT OF Mn, Mg, F on (Ba, Sr)PZT FILMS PIEZOELECTRIC RESPONSE FOR SPECIFIC MEMS APPLICATIONS

By Nguyen Thu Trang   Detalle M.   Remiens D.   Lebrun L.   Guyomar D.  

Integrated Ferroelectrics, Vol. 96, Iss. 1, 2008-01 ,pp. : 40-50

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PREPARATION AND PIEZOELECTRIC PROPERTIES OF SOL-GEL-DERIVED NB-DOPED PZT FILMS FOR MEMS APPLICATIONS

By KWOK K.   KWOK K.   TSANG R. C.   CHAN H. L.   CHOY C.  

Integrated Ferroelectrics, Vol. 80, Iss. 1, 2006-11 ,pp. : 155-162

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