Fabrication and characterization of laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT structure

Author： Yoshida Shinya Wang Nan Kumano Masafumi Kawai Yusuke Tanaka Shuji Esashi Masayoshi

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65014-65024

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Design and fabrication of a high-aspect-ratio parylene-based comb-drive actuator for large displacements at a low driving force

By Kuo Wen-Cheng Chen Chen-Wei Liu Chih-Ming

Journal of Micromechanics and Microengineering, Vol. 23, Iss. 6, 2013-06 ,pp. : 65021-65027

IOP Publishing

Access to resources Recommend Favorite

SOL-GEL FABRICATION OF PZT THICK FILMS FOR MEMS

By Corkovic S. Whatmore R. W. Zhang Q.

Integrated Ferroelectrics, Vol. 88, Iss. 1, 2007-02 ,pp. : 93-102

Taylor & Francis Ltd

Access to resources Recommend Favorite

Sol-Gel PZT for MEMS Applications

By Piekarski Brett Dubey Madan Zakar Eugene Polcawich Ronald DeVoe Don Wickenden Dennis

Integrated Ferroelectrics, Vol. 42, Iss. 1, 2002-01 ,pp. : 25-37

Taylor & Francis Ltd

Access to resources Recommend Favorite

Molybdenum etching using an SF₆, BCl₃ and Ar based recipe for high aspect ratio MEMS device fabrication

By Sharma J Fernando S N Deng W Singh N Tan W M

Journal of Micromechanics and Microengineering, Vol. 23, Iss. 7, 2013-07 ,pp. : 75025-75032

IOP Publishing

Access to resources Recommend Favorite

Fabrication of a Polymer High-Aspect-Ratio Pillar Array Using UV Imprinting

By Shinohara Hidetoshi Goto Hiroshi Kasahara Takashi Mizuno Jun

Micromachines, Vol. 4, Iss. 2, 2013-04 ,pp. : 157-167

MDPI

Access to resources Recommend Favorite