Integrated PNZT Structures for MEMS Gyroscope

Author: NISTORICA CORINA   ZHANG JIAN   PADMINI P.   KOTRU SUSHMA   PANDEY R.  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.63, Iss.1, 2004-01, pp. : 49-54

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Abstract