A systematic approach for precision electrostatic mode tuning of a MEMS gyroscope

Author： Hu Z X   Gallacher B J   Burdess J S   Bowles S R   Grigg H T D  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.12, 2014-12, pp. : 125003-125017

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