Preparations of PZT Thin Film Capacitors on PtRhO x Electrodes With Various Conducting Barriers for High Density Ferroelectric Memories

Author: LEE KWANG   LEE KYUNG  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.64, Iss.1, 2004-01, pp. : 305-316

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Abstract