STUDY ON STRESS OF THE FILMS APPLIED TO FeRAM

Author： JIA ZE   HU HONG   XIE DAN   ZHANG ZHI-GANG   ZHANG NING-XIN   REN TIAN-LING   LIU LI-TIAN  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.81, Iss.1, 2006-11, pp. : 97-103

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