TWO STEP REACTIVE MAGNETRON SPUTTERING OF BLT THIN FILMS

Author： Besland M. P. Borderon C. Cavellier M. Tacon S. Le Richard-Plouet M. Albertini D. Averty D. Tessier P. Y. Gundel H. W. Brohan L. Djouadi M. A.

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.94, Iss.1, 2007-10, pp. : 94-104

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