A ZnO thin-film driven microcantilever for nanoscale actuation and sensing

Author: Yuan Yanhui   Shyong Chow Kun   Du Hejun   Wang Peihong   Zhang Mingsheng   Yu Shengkai   Liu Bo  

Publisher: Taylor & Francis Ltd

ISSN: 1947-5411

Source: International Journal of Smart and Nano Materials, Vol.4, Iss.2, 2013-06, pp. : 128-141

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