The effects of process condition of top-TiN and TaN thickness on the effective work function of MOSCAP with high-k/metal gate stacks

Author: Xueli Ma   Hong Yang   Wenwu Wang   Huaxiang Yin   Huilong Zhu   Chao Zhao   Dapeng Chen   Tianchun Ye  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.35, Iss.10, 2014-10, pp. : 106002-106004

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