Author: Nomura Ken-ichi Kusaka Yasuyuki Ushijima Hirobumi Nagase Kazuro Ikedo Hiroaki Mitsui Ryosuke Takahashi Seiya Nakajima Shin-ichiro Iwata Shiro
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.9, 2014-09, pp. : 95021-95027
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