Author: Weisensee Patricia B Torrealba Eduardo J Raleigh Mark Jacobi Anthony M King William P
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.9, 2014-09, pp. : 95020-95029
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
By Hu Huan Swaminathan Vikhram V Mensing Glennys Yeom Junghoon Shannon Mark A Zhu Likun
Journal of Micromechanics and Microengineering, Vol. 24, Iss. 9, 2014-09 ,pp. :