Fabrication and characterization of a charge-biased CMOS-MEMS resonant gate field effect transistor

Author： Chin C H Li C S Li M H Wang Y L Li S S

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.9, 2014-09, pp. : 95005-95016

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