An investigation of the mechanical strengthening effect of hydrogen anneal for silicon torsion bar

Author: Hajika Ryo   Yoshida Shinya   Kanamori Yoshiaki   Esashi Masayoshi   Tanaka Shuji  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.10, 2014-10, pp. : 105014-105024

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