Low temperature anneal of electron irradiation induced defects in p type silicon

Author: Trauwaert M.-A.   Vanhellemont J.   Maes H. E.   Bavel A.-M. Van   Langouche G.  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.14, Iss.12, 1998-12, pp. : 1295-1298

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